Water-castable bottom antireflective coatings

Lu P-H, Mehtsun S, Sagan JP, Dammel RR, McCulloch IA, Kang M, Tanaka H, Kimura K

29 June 1998

Conference paper

Journal:

Proceedings of SPIE--the International Society for Optical Engineering

Volume:

3333

SPIE, the international society for optics and photonics

pp.

806 - 817

No abstract available

Keywords:

40 Engineering

4006 Communications Engineering

4009 Electronics, Sensors and Digital Hardware

51 Physical Sciences

5102 Atomic, Molecular and Optical Physics

DOI