Data in support of Impact of precursor dosing on the surface passivation of AZO/AlOx stacks formed using atomic layer deposition

Wang Y, Hobson T, Swallow J, McNab S, O'Sullivan J, Soeriyadi A, Niu X, Fraser R, Dasgupta A, Maitra S, Altermatt P, Weatherup R
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et al
1 January 2025
Dataset
University of Oxford

All data reported in publication: Impact of precursor dosing on the surface passivation of AZO/AlOx stacks formed using atomic layer deposition

ORA record